ENSURING THE CLEANNESS OF THE IMPLANTED MATERIAL IN THE PROCESS OF MANUFACTURING THE NUCLEAR POWER MICROSCOPE PROBE
Keywords:
nuclear power microscope, probe, ion implantation, slope radiusAbstract
At manufacturing a nuclear power microscope probe, the dependence of the ion motion slope radius from the applied accelerating voltage for different values of the magnetic field vector has been determined in the process of boron ion implantation to provide the cleanliness of the implanted material.