DEVELOPING A TECHNOLOGY FOR PRODUCING MICROELECTRODES TO DERIVE BIOPOTENTIALS
Keywords:
elaboration of biopotential microelectrodes, thin metalic layer, allowing ability of potholithographyAbstract
At developing the structure and succession of the technology for produsing microelectrodes to derive biopotentials, the possibility of formation of sharp metallic ends by the method of photolhitography, the permissible ability of photolithogaphy depending on different factors are studied.