FORMATION AND INVESTIGATION OF BLACK SILICON
Keywords:
black silicon, etching, needles, density, height, solar cellsAbstract
The formation of black silicon (b-Si) on the silicon surface by Plasma Reactive Ion Etching using an SF6/O2 gas mixture is studied. It is shown that the density and the height of the needles strongly depend on the formation conditions of b-Si, in particular, the gas flow rates and the etching time.