FORMATION AND INVESTIGATION OF BLACK SILICON

Authors

  • G.Y. AYVAZYAN National Polytechnic University of Armenia Author
  • K.G. AYVAZYAN National Polytechnic University of Armenia Author
  • S.KH. KHUDAVERDYAN National Polytechnic University of Armenia Author

Keywords:

black silicon, etching, needles, density, height, solar cells

Abstract

The formation of black silicon (b-Si) on the silicon surface by Plasma Reactive Ion Etching using an SF6/O2 gas mixture is studied. It is shown that the density and the height of the needles strongly depend on the formation conditions of b-Si, in particular, the gas flow rates and the etching time.

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Published

17.07.2026

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