DEVELOPING THE PRODUCTION TECHNOLOGY OF A MDS TRANSISTOR BASED ON THE CARBON NANOTUBE

Authors

  • O.A. ZADOYAN National Polytechnic University of Armenia Author
  • M.T. KARAPETYAN National Polytechnic University of Armenia Author
  • H.A. TOROSYAN National Polytechnic University of Armenia Author

Keywords:

carbon nanotube, MDS transistor, wavelength, refractive index

Abstract

A technological sequence of the metal-dielectric-semiconductor (MDS) transistor based on a carbon nanotube has been developed. The dependences of the minimum length of the photolithography process on the wavelength at different indexes have been determined.

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Published

05.05.2026

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Section

Articles