DEVELOPING THE PRODUCTION TECHNOLOGY OF A MDS TRANSISTOR BASED ON THE CARBON NANOTUBE

Authors

O.A. ZADOYAN National Polytechnic University of Armenia Author
M.T. KARAPETYAN National Polytechnic University of Armenia Author
H.A. TOROSYAN National Polytechnic University of Armenia Author

Keywords:

carbon nanotube, MDS transistor, wavelength, refractive index

Abstract

A technological sequence of the metal-dielectric-semiconductor (MDS) transistor based on a carbon nanotube has been developed. The dependences of the minimum length of the photolithography process on the wavelength at different indexes have been determined.

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05.05.2026

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