ENSURING THE CLEANNESS OF THE IMPLANTED MATERIAL IN THE PROCESS OF MANUFACTURING THE NUCLEAR POWER MICROSCOPE PROBE

Authors

O.A. ZADOYAN National Polytechnic University of Armenia Author
K.A. SUQIASYAN National Polytechnic University of Armenia Author

Keywords:

nuclear power microscope, probe, ion implantation, slope radius

Abstract

At manufacturing a nuclear power microscope probe, the dependence of the ion motion slope radius from the applied accelerating voltage for different values of the magnetic field vector has been determined in the process of boron ion implantation to provide the cleanliness of the implanted material.

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01.06.2026

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