DEVELOPING THE STRUCTURE AND PREPARATION TECHNOLOGY OF MULTI-ELECTRODE SILICON PROBE FOR THE BIOPOTENTIAL REPRODUCTION

Abstract

At developing the structure and preparation technology of multi-electrode silicon probe for biopotential reproduction, the way a microelectrode goes through the human skin and reaches the target organ has been researched. This has successfully decreased the pain of the patient by minimizing the size of the microelectrode. The dependence of the silicon dioxide thickness on the surface of а microelectrode shown at different environments and temperatures, as well as the need to receive 19 electrons, which will be enough to get clear information ensuring the electrode layout whitin the limits of the size of the probe are shown.