PRODUCTION OF DIAMOND-LIKE CARBON FILMS WITH REQUIRED OPTICAL PROPERTIES USING ION PLASMA

Abstract

A technology has been developed for applying a three-layer carbon film with various refractive indexes on the metals Al, Fe, as well as on glass surfaces. An adhesive layer was applied with a thickness of d = 50 nm and a refractive index of n = 2.1 by varying the power of the ion source from 40-180 W, while the concentration of nitrogen in the chamber was 5% -45%. After that, a layer with a high absorption coefficient in the IR region with a thickness of d = 2.5 μm and a refractive index of n = 1.3 was deposited on the adhesive layer. The outer protective layer had a thickness d = 1.5 μm and a refractive index n = 1.9. This structure reduced the IR reflection coefficient by 50% of the metal surface.