RAMAN STUDY OF THIN-FILM AMORPHOUS SILICON DOPED WITH SILVER NANOPARTICLES

Abstract

The peculiarities of the process of simultaneous magnetron sputtering on a substrate of polycrystalline silicon and silver are studied. Coatings from an amorphous silica dispersed therein with silver nanoparticles, as well aselectron microscope images and atomic force microscope images of the coatingsare obtained. Raman spectra study of the resulting films show increased scattering of the vibrational modes of amorphous silicon films with silver nanoparticles.