SYNTHESIS OF CARBON DIAMON-LIKE FILMS AND STUDY OF OPTICAL AND MECHANICAL PROPERTIES

Abstract

DLCs of different thicknesses were synthesized from the plasma flux obtained by the fission of hydrocarbon vapors in the mutilating plasma of reciprocating electric and magnetic fields. On platforms made of different materials, in the ionic source with a capacity of 60-180 W and in the gas mixture of up to 40% of nitrogen, 250-300 nm thick DLC was grown. The effect of change in the amount of nitrogen and electric field on the structure of the membrane and optical-mechanical properties of the film has been studied.